Abstract
This paper presents a new design of vibratory four degree-of-freedom (DOF) gyroscope, which is inherently robust to keep stable sensitivity under changes of environmental temperature and pressure. The frequency response of the gyroscope has two resonant peaks close to each other, and the operating range is in the flat region between the two peaks. Simulation results show that the sensing amplitude increases by only 1.6% when the temperature rises from 25°C to 75 °C, and drops by only 6% when the pressure increases from 0.1 to 1 Torr.
Original language | English |
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Pages (from-to) | 199-202 |
Number of pages | 4 |
Journal | Advanced Materials Research |
Volume | 254 |
Early online date | 31 May 2011 |
DOIs | |
Publication status | Published - 12 Jul 2011 |
Externally published | Yes |
Event | International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec, Singapore Duration: 26 Jun 2011 → 1 Jul 2011 |
Keywords
- Gyroscope
- MEMS
- Frequency response
- Vibratory