The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD

N. Nelson, R. T. Rakowski, J. Franks, P. Woolliams, P. Weaver, B. J. Jones*

*Corresponding author for this work

Research output: Contribution to journalArticle

20 Citations (Scopus)
12 Downloads (Pure)

Fingerprint Dive into the research topics of 'The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy