The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD
- N. Nelson
- , R. T. Rakowski
- , J. Franks
- , P. Woolliams
- , P. Weaver
- , B. J. Jones*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
42
Link opens in a new tab
Citations
(Scopus)
86
Downloads
(Pure)