The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD

N. Nelson, R. T. Rakowski, J. Franks, P. Woolliams, P. Weaver, B. J. Jones*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)
34 Downloads (Pure)

Fingerprint

Dive into the research topics of 'The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD'. Together they form a unique fingerprint.

Physics

Engineering

Material Science